ISO 11952:2019
p
ISO 11952:2019
67552
Indisponible en français

État actuel : Publiée

fr
Format Langue
std 1 194 PDF + ePub
std 2 194 Papier
  • CHF194
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Résumé

This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

This document has the following objectives:

— to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;

— to define the minimum requirements for the calibration process and the conditions of acceptance;

— to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument);

— to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);

— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;

— to define the requirements for reporting results.

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Informations générales

  •  : Publiée
     : 2019-05
    : Norme internationale publiée [60.60]
  •  : 2
  • ISO/TC 201/SC 9
    71.040.40 
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