Тезис

ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.

Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.


Общая информация 

  • Текущий статус
     : Отозвано
    Дата публикации
     : 2006-11
  • Версия
     : 1
  • Технический комитет
     : ISO/TC 201/SC 2 General procedures
  • ICS
     :
    71.040.40 Chemical analysis

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  2. Интернет-магазин
  3. Каталог стандартов
  4. МКС
  5. 71
  6. 71.040
  7. 71.040.40
  8. ISO 18516:2006