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Standard and/or project under the direct responsibility of ISO/TC 201/SC 9 Secretariat Stage ICS
Surface chemical analysis — Scanning probe microscopy — Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements
40.00
Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
90.93
Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
90.93
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
95.99
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
90.93
Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
90.93
Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
90.93
Guideline to describe AFM probe properties
20.00
Surface chemical analysis — Atomic force microscopy — Guideline for quantitative nanoscale potential measurement by Kelvin probe force microscopy
30.98
Surface chemical analysis — Scanning probe microscopy — Procedure for the determination of elastic moduli for compliant materials using atomic force microscope and the two-point JKR method
60.60
Surface chemical analysis — scanning probe microscopy — Guideline for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy
20.99
Surface chemical analysis — Atomic force microscopy — Guideline for restoration procedure for atomic force microscopy images dilated by finite probe size
60.60
Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope
90.93

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