ISO 23833:2006 is a bilingual (English/French) vocabulary which defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order.
It is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of the standard are applicable to those documents relevant to the practices of related fields (e.g. SEM, AEM, EDX) for definition of those terms common to them.