Reference number
ISO 14644-10:2013
ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Edition 1
2013-03
Withdrawn
ISO 14644-10:2013
52440
Withdrawn (Edition 1, 2013)

Abstract

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

General information

  •  : Withdrawn
     : 2013-03
    : Withdrawal of International Standard [95.99]
  •  : 1
     : 30
  • ISO/TC 209
    13.040.35 
  • RSS updates

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