International Standard
ISO 25178-607:2019
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
Reference number
ISO 25178-607:2019
ISO 25178-607:2019
Edition 1
2019-03
2019-03
© ISO 2024
International Standard
Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
General information
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Status: PublishedPublication date: 2019-03Stage: International Standard under systematic review [90.20]
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Edition: 1Number of pages: 21
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Technical Committee :ISO/TC 213ICS :17.040.20
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