ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Status: PublishedPublication date: 2016-09
Edition: 2Number of pages: 11
Technical Committee: ISO/TC 201/SC 7 Electron spectroscopies
Buy this standard
|std 1 61||PDF + ePub|
|std 2 61||Paper|