Abstract
PreviewISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
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Status: PublishedPublication date: 2016-09
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Edition: 2Number of pages: 11
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- ICS :
- 71.040.40 Chemical analysis
Buy this standard
Format | Language | |
---|---|---|
std 1 61 | PDF + ePub | |
std 2 61 | Paper |
- CHF61
Life cycle
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Previously
WithdrawnISO 17973:2002
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Now
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Will be replaced by
Under developmentISO/DIS 17973
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