Draft
International Standard
ISO/DIS 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/DIS 23131-3
Edition 1
© ISO 2025
Draft International Standard
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ISO/DIS 23131-3

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CHF 65
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Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  • Status
     : Under development

    You can help develop this draft international standard by contacting your national member

    Stage
    : DIS ballot initiated: 12 weeks [40.20]
  • Edition
     : 1
    Number of pages
     : 30
  • Technical Committee :
    ISO/TC 107
    ICS :
    17.020 
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